Ư¡
ڷ

(ppm)

(Air=1)

()

(at)
Ar
Ƹ
39.95
   
0.38
-185.8
 
H2
2.02
   
0.069
-252.9
 
He
4.00
 
0.138
-268.9
 
Kr
ũ
83.80
Ը  
2.89
-153.6
 
N2
28.01
   
0.967
-195.8
 
Ne
20.18
   
0.695
-246.1
 
O2
32.00
0.05
1.105
-183.0
 
Xe
ũ
131.30
 
(0.2mg/asAs)
4.53
-108.1
 
AsH3
Ƹ
77.95
Ը  
2.695
-62.48
8.58K
AsCI3
181.28
ݯ
(0.2mg/asAs)
 
130.4
2.4m
AsCI5
252.19
 
(0.2mg/asAs)
     
AsF3
131.92
ݯ
0.1
 
60.4
48.9m
AsF5
169.91
ݯ    
-52.9
 
B2H6
𺸶
27.67
Ը ݯ
1
0.95
-92.8
28.10K
BCI3
3ȭؼ
117.17
Ը
1
4.10
12.5
470m
BBr3
3ȭؼ
250.52
Ը
5000
 
91.2
19m
BF3
3ȭؼ
67.81
Ը  
2.38
-100.3
 
CO2
̻ȭź
44.01
   
1.521
-78.2
35.85K
CH4
ź
16.04
5
0.555
-161.5
-
C2H2
Ƽĥ
26.04
 
0.906
-75.0
-
CCI4
翰ȭź
118.37
Ը  
5.32
76.7
33m
CF4
4ȭź
88.00
   
3.05
-127.9
-
CHF3
3ȭź
70.01
   
2.417
-82.0
25.00K
C2F6
6ȭź
138.01
   
4.823
-78.2
18.80K
C2CIF5
5ȭȭź
154.47
   
5.545
-39.1
4.55K
C3F5
188.37
   
6.64
-36.7
4.24K
CI2
70.91
Ը ݯ
1
2.474
-34.1
3.82K
F2
Ҽ
38.00
Ը ݯ
1
1.311
-188.0
-
GeH4
Ը
76.62
Ը
0.2
2.645
-90.0
25.11K
GeCI4
4ȭԸ
214.40
Ը ݯ
-
1.879
83.1
25m
HCI
ȭ
36.46
Ը ݯ
5
1.268
-85
26.55K
HF
ȭ
20.01
Ը ݯ
(3asF)
1.27
19.54
360m
HBr
ȭ
80.91
Ը ݯ
3
2.812
-66.8
13.74K
H2S
ȭ
34.08
Ը ݯ
10
1.189
60.7
10.33K
MoF6
6ȭε
209.93
Ը ݯ
(5mg/asAs)
7.27
35
202m
MoCI5
5ȭε
273.21
Ը ݯ
(0.2mg/asMo)
     
NH3
ϸϾ
17.03
Ը ݯ
25
0.597
-33.4
4.55K
N(CH3)3
Ʈĥƹ
59.11
Ը
10
2.087
2.87
645m
NF3
71.00
() Ը ݯ
10
2.49
-129
-
NO
ϻȭǼ
30.01
Ը (ݯ)
25
1.037
-151.7
 
NO2
̻ȭǼ
46.01
Ը ݯ
3
2.83
1.15
172m
N2O
ϻȭ̽Ǽ
44.01
 
1.530
-89.5
34.51K
PH3
34.00
ݯ
0.3
1.146
-87.7
22.42K
PCI3
137.33
Ը ݯ
0.2
 
74.7
34m
PCI5
208.24
Ը ݯ
0.1
 
160(ȭ)
 
PF3
87.97
Ը  
3.05
-101.1
 
PF5
125.96
Ը  
4.46
-84.6
 
POCI3
īÿȭ
153.33
Ը ݯ
0.1
5.32
105.3
 
SiH4
Ƕ
32.12
Ը
5
1.12
-111.9
24.2K
Si2H6
Ƕ
62.12
Ը  
2.26
-14.5
1.86K
Si3H8
ƮǶ
92.32
Ը    
53
0.125K
SiH2CI2
ũηνǶ
101.01
Ը ݯ  
3.51
8.4
610m
SiHCl3
3ȭǶ
135.45
Ը ݯ    
31.8
218m
SiCL4
翰ȭԼ
169.90
Ը    
57.6
 
SiHF3
ƮķηνǶ
86.09
Ը ݯ  
2.97
-95.0
19.78K
SiH2F2
ķηνǶ
68.10
Ը ݯ  
2.35
-77.8
25.3K
SiH3F
ķηνǶ
50.11
Ը ݯ  
1.73
-98.0
53.2K
SiF4
4ȭԼ
104.08
Ը ݯ  
3.63
-95.5
103.5K
Si2F6
6ȭ2Լ
170.16
Ը ݯ  
5.997
-19.1
2.5K
SF4
4ȭȲ
108.06
Ը ݯ
0.1
3.78
-40.4
5.06K
SF6
6ȭȲ
146.05
 
1000
5.11
-63.8(ȭ)
13.95K
SbH3
Ƽ
124.77
Ը
0.1
4.33
-18.4
2.0K
SbCI5
5ȭƼ
299.02
Ը ݯ
(0.5mg/asSb)
 
140
 
H2Se
ȭ
80.98
Ը ݯ
0.05
2.80
-41.2
5.12K
SnH4
ȭּ
122.72
Ը
(2mg/asSn)
 
52
 
SnCI4
4ȭƼ
260.50
Ը ݯ
(2mg/asSn)
 
114
5.4m
H2Te
׷ȭ
129.62
Ը
(0.1mg/asTe)
4.50
-1.8
1.24K
WF6
6ȭֽ
297.84
Ը ݯ
(1mg/asW)
 
17.06
 
WCI6
6ȭֽ
396.57
Ը ݯ
(1mg/asW)
 
346.7
 
AI(CH3)3
Ʈĥ˷̴
72.09
Ը
(2mg/asA1)
 
127.1
 
AI(C2H5)3
Ʈĥ˷̴
114.17
Ը
(2mg/asA1)
 
186.6
1.0m
Ga(CH3)3
Ʈĥ
114.83
Ը    
55.8
66m
Ga(C2H5)3
Ʈĥ
156.91
Ը    
142.6
9.2(at20)
In(CH3)3
Ʈĥε
159.93
Ը
(0.1mg/asIn)
 
135.8
 
In(C2H5)3
Ʈĥε
202.01
Ը
(0.1mg/asIn)
 
184
1.18(at20)
Sn(CH3)4
Ʈĥּ
178.83
Ը
(0.1mg/asIn)
 
78
 
Sn(C2H5)4
Ʈĥּ
234.94
Ը
(0.1mg/asIn)
 
175
 
Zn(CH3)2
ĥƿ
95.44
Ը    
44
123m
Zn(C2H5)2
ĥƿ
123.49
Ը    
117.6
3.6m
 
 
 
 
󳲵 â ȸ ߸ 1127-35 ()â  |  TEL : 055-232-2000