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°¡ ½º ¸í
|
ºÐÀÚ·®
|
¼º Áú
|
Çã¿ë³óµµ
(ppm)
|
ºñÁß
(Air=1)
|
ºñÁ¡
(¡É)
|
Áõ±â¾Ð
(at¡É)
|
|
Ar |
¾Æ¸£°ï |
39.95 |
|
|
0.38 |
-185.8 |
|
|
H2 |
¼ö ¼Ò |
2.02 |
|
|
0.069 |
-252.9 |
|
|
He |
Çï ·ý |
4.00 |
æ× |
|
0.138 |
-268.9 |
|
|
Kr |
Å©¸²Åæ |
83.80 |
Ô¸ |
|
2.89 |
-153.6 |
|
|
N2 |
½Ç ¼Ò |
28.01 |
|
|
0.967 |
-195.8 |
|
|
Ne |
³× ¿Â |
20.18 |
|
|
0.695 |
-246.1 |
|
|
O2 |
»ê ¼Ò |
32.00 |
ò¨ |
0.05 |
1.105 |
-183.0 |
|
|
Xe |
Å©¼¼³í |
131.30 |
|
(0.2mg/§©asAs) |
4.53 |
-108.1 |
|
|
AsH3 ¡Ø |
¾Æ¸£½Å |
77.95 |
æ× Ô¸ ö« |
|
2.695 |
-62.48 |
8.58K |
|
AsCI3 ¡Ø |
3¿°Èºñ¼Ò |
181.28 |
æ× Ý¯ ö« |
(0.2mg/§©asAs) |
|
130.4 |
2.4m |
|
AsCI5 ¡Ø |
5¿°Èºñ¼Ò |
252.19 |
|
(0.2mg/§©asAs) |
|
|
|
|
AsF3 ¡Ø |
3ºÒȺñ¼Ò |
131.92 |
æ× Ý¯ ö« |
0.1 |
|
60.4 |
48.9m |
|
AsF5 ¡Ø |
5ºÒȺñ¼Ò |
169.91 |
æ× Ý¯ ö« |
|
|
-52.9 |
|
|
B2H6 ¡Ø |
µðº¸¶õ |
27.67 |
æ× Ô¸ ݯ ö« |
1 |
0.95 |
-92.8 |
28.10K |
|
BCI3 ¡Ø |
3¿°ÈºØ¼Ò |
117.17 |
æ× Ô¸ ö« |
1 |
4.10 |
12.5 |
470m |
|
BBr3 |
3ÃëÈºØ¼Ò |
250.52 |
æ× Ô¸ ö« |
5000 |
|
91.2 |
19m |
|
BF3 ¡Ø |
3ºÒÈºØ¼Ò |
67.81 |
æ× Ô¸ ö« |
|
2.38 |
-100.3 |
|
|
CO2 |
ÀÌ»êÈź¼Ò |
44.01 |
|
|
1.521 |
-78.2 |
35.85K |
|
CH4 |
¸Þź |
16.04 |
æ× |
5 |
0.555 |
-161.5 |
- |
|
C2H2 |
¾Æ¼¼Ä¥·» |
26.04 |
æ× |
|
0.906 |
-75.0 |
- |
|
CCI4 |
»ç¿°Èź¼Ò |
118.37 |
Ô¸ ö« |
|
5.32 |
76.7 |
33m |
|
CF4 |
4ºÒȸÞź |
88.00 |
|
|
3.05 |
-127.9 |
- |
|
CHF3 |
3ºÒȸÞź |
70.01 |
|
|
2.417 |
-82.0 |
25.00K |
|
C2F6 |
6ºÒȸÞź |
138.01 |
|
|
4.823 |
-78.2 |
18.80K |
|
C2CIF5 |
5ºÒÈ¿°È¸Þź |
154.47 |
|
|
5.545 |
-39.1 |
4.55K |
|
C3F5 |
8ºÒÈÇÁ·ÎÆÇ |
188.37 |
|
|
6.64 |
-36.7 |
4.24K |
|
CI2 |
¿° ¼Ò |
70.91 |
ò¨ Ô¸ ݯ ö« |
1 |
2.474 |
-34.1 |
3.82K |
|
F2 |
ºÒ¼Ò |
38.00 |
ò¨ Ô¸ ݯ ö« |
1 |
1.311 |
-188.0 |
- |
|
GeH4 ¡Ø |
°Ô¸£¸¸ |
76.62 |
æ× Ô¸ ö« |
0.2 |
2.645 |
-90.0 |
25.11K |
|
GeCI4 |
4¿°È°Ô¸£¸¸ |
214.40 |
Ô¸ ݯ ö« |
- |
1.879 |
83.1 |
25m |
|
HCI |
¿°È¼ö¼Ò |
36.46 |
Ô¸ ݯ ö« |
5 |
1.268 |
-85 |
26.55K |
|
HF |
ºÒȼö¼Ò |
20.01 |
Ô¸ ݯ ö« |
(3asF) |
1.27 |
19.54 |
360m |
|
HBr |
Ãëȼö¼Ò |
80.91 |
Ô¸ ݯ ö« |
3 |
2.812 |
-66.8 |
13.74K |
|
H2S |
·ùȼö¼Ò |
34.08 |
æ× Ô¸ ݯ ö« |
10 |
1.189 |
60.7 |
10.33K |
|
MoF6 ¡Ø |
6ºÒȸô¸®ºÎµ§ |
209.93 |
Ô¸ ݯ ö« |
(5mg/§©asAs) |
7.27 |
35 |
202m |
|
MoCI5 |
5¿°È¸ô¸®ºÎµ§ |
273.21 |
Ô¸ ݯ ö« |
(0.2mg/§©asMo) |
|
|
|
|
NH3 |
¾Ï¸ð´Ï¾Æ |
17.03 |
æ× Ô¸ ݯ ö« |
25 |
0.597 |
-33.4 |
4.55K |
|
N(CH3)3 |
Æ®¸®¸ÞÄ¥¾Æ¹Î |
59.11 |
æ× Ô¸ ö« |
10 |
2.087 |
2.87 |
645m |
|
NF3 ¡Ø |
3ºÒÈÁú¼Ò |
71.00 |
(ò¨) Ô¸ ݯ ö« |
10 |
2.49 |
-129 |
- |
|
NO |
ÀÏ»êÈ½Ç¼Ò |
30.01 |
ò¨ Ô¸ (ݯ) ö« |
25 |
1.037 |
-151.7 |
|
|
NO2 |
ÀÌ»êÈ½Ç¼Ò |
46.01 |
ò¨ Ô¸ ݯ ö« |
3 |
2.83 |
1.15 |
172m |
|
N2O |
ÀÏ»êÈÀÌ½Ç¼Ò |
44.01 |
ò¨ |
|
1.530 |
-89.5 |
34.51K |
|
PH3 ¡Ø |
Æ÷½ºÇÉ |
34.00 |
æ× Ý¯ ö« |
0.3 |
1.146 |
-87.7 |
22.42K |
|
PCI3 ¡Ø |
3¿°ÈÀÎ |
137.33 |
Ô¸ ݯ ö« |
0.2 |
|
74.7 |
34m |
|
PCI5 ¡Ø |
5¿°ÈÀÎ |
208.24 |
Ô¸ ݯ ö« |
0.1 |
|
160(½ÂÈÁ¡) |
|
|
PF3 ¡Ø |
3ºÒÈÀÎ |
87.97 |
Ô¸ ö« |
|
3.05 |
-101.1 |
|
|
PF5 ¡Ø |
5ºÒÈÀÎ |
125.96 |
Ô¸ ö« |
|
4.46 |
-84.6 |
|
|
POCI3 |
¿ÀÄ«½Ã¿°ÈÀÎ |
153.33 |
Ը ݯ |
0.1 |
5.32 |
105.3 |
|
|
SiH4 ¡Ø |
¸ð³ë½Ç¶õ |
32.12 |
æ× Ô¸ ö« |
5 |
1.12 |
-111.9 |
24.2K |
|
Si2H6 ¡Ø |
µð½Ç¶õ |
62.12 |
æ× Ô¸ ö« |
|
2.26 |
-14.5 |
1.86K |
|
Si3H8 |
Æ®¸®½Ç¶õ |
92.32 |
æ× Ô¸ ö« |
|
|
53 |
0.125K |
|
SiH2CI2 ¡Ø |
µðÅ©·Î·Î½Ç¶õ |
101.01 |
æ× Ô¸ ݯ ö« |
|
3.51 |
8.4 |
610m |
|
SiHCl3 ¡Ø |
3¿°È½Ç¶õ |
135.45 |
æ× Ô¸ ݯ ö« |
|
|
31.8 |
218m |
|
SiCL4 |
»ç¿°È±Ô¼Ò |
169.90 |
Ô¸ æ× ö« |
|
|
57.6 |
|
|
SiHF3 |
Æ®¸®ÈķηνǶõ |
86.09 |
æ× Ô¸ ݯ ö« |
|
2.97 |
-95.0 |
19.78K |
|
SiH2F2 |
µðÈķηνǶõ |
68.10 |
æ× Ô¸ ݯ ö« |
|
2.35 |
-77.8 |
25.3K |
|
SiH3F |
¸ð³ëÈķηνǶõ |
50.11 |
æ× Ô¸ ݯ ö« |
|
1.73 |
-98.0 |
53.2K |
|
SiF4 ¡Ø |
4ºÒÈ±Ô¼Ò |
104.08 |
Ô¸ ݯ ö« |
|
3.63 |
-95.5 |
103.5K |
|
Si2F6 |
6ºÒÈ2±Ô¼Ò |
170.16 |
Ô¸ ݯ ö« |
|
5.997 |
-19.1 |
2.5K |
|
SF4 ¡Ø |
4ºÒÈÀ¯È² |
108.06 |
Ô¸ ݯ ö« |
0.1 |
3.78 |
-40.4 |
5.06K |
|
SF6 |
6ºÒÈÀ¯È² |
146.05 |
|
1000 |
5.11 |
-63.8(½ÂÈÁ¡) |
13.95K |
|
SbH3 ¡Ø |
½ºÆ¼ºó |
124.77 |
æ× Ô¸ ö« |
0.1 |
4.33 |
-18.4 |
2.0K |
|
SbCI5 ¡Ø |
5¿°È¾ÈƼ¸ó |
299.02 |
Ô¸ ݯ ö« |
(0.5mg/§©asSb) |
|
140 |
|
|
H2Se ¡Ø |
¼¼·»È¼ö¼Ò |
80.98 |
Ô¸ ݯ ö« |
0.05 |
2.80 |
-41.2 |
5.12K |
|
SnH4 ¡Ø |
¼ö¼ÒÈÁÖ¼® |
122.72 |
æ× Ô¸ ö« |
(2mg/§©asSn) |
|
52 |
|
|
SnCI4 |
4¿°È¾ÈƼ¸ó |
260.50 |
Ô¸ ݯ ö« |
(2mg/§©asSn) |
|
114 |
5.4m |
|
H2Te |
Å×·ç·çȼö¼Ò |
129.62 |
æ× Ô¸ ö« |
(0.1mg/§©asTe) |
4.50 |
-1.8 |
1.24K |
|
WF6 ¡Ø |
6ºÒÈÅÖ½ºÅÙ |
297.84 |
Ô¸ ݯ ö« |
(1mg/§©asW) |
|
17.06 |
|
|
WCI6 ¡Ø |
6¿°ÈÅÖ½ºÅÙ |
396.57 |
Ô¸ ݯ ö« |
(1mg/§©asW) |
|
346.7 |
|
|
AI(CH3)3 |
Æ®¸®¸ÞÄ¥¾Ë·ç¹Ì´½ |
72.09 |
æ× Ô¸ ö« |
(2mg/§©asA1) |
|
127.1 |
|
|
AI(C2H5)3 |
Æ®¸®¿¡Ä¥¾Ë·ç¹Ì´½ |
114.17 |
æ× Ô¸ ö« |
(2mg/§©asA1) |
|
186.6 |
1.0m |
|
Ga(CH3)3 ¡Ø |
Æ®¸®¸ÞÄ¥°¥·ý |
114.83 |
æ× Ô¸ ö« |
|
|
55.8 |
66m |
|
Ga(C2H5)3 ¡Ø |
Æ®¸®¿¡Ä¥°¥·ý |
156.91 |
æ× Ô¸ ö« |
|
|
142.6 |
9.2(at20¡É) |
|
In(CH3)3 ¡Ø |
Æ®¸®¸ÞÄ¥Àεã |
159.93 |
æ× Ô¸ ö« |
(0.1mg/§©asIn) |
|
135.8 |
|
|
In(C2H5)3 |
Æ®¸®¿¡Ä¥Àεã |
202.01 |
æ× Ô¸ ö« |
(0.1mg/§©asIn) |
|
184 |
1.18(at20¡É) |
|
Sn(CH3)4 |
Å×Æ®¶ó¸ÞÄ¥ÁÖ¼® |
178.83 |
æ× Ô¸ ö« |
(0.1mg/§©asIn) |
|
78 |
|
|
Sn(C2H5)4 |
Å×Æ®¶ó¿¡Ä¥ÁÖ¼® |
234.94 |
æ× Ô¸ ö« |
(0.1mg/§©asIn) |
|
175 |
|
|
Zn(CH3)2 |
µð¸ÞÄ¥¾Æ¿¬ |
95.44 |
æ× Ô¸ ö« |
|
|
44 |
123m |
|
Zn(C2H5)2 |
µð¿¡Ä¥¾Æ¿¬ |
123.49 |
æ× Ô¸ ö« |
|
|
117.6 |
3.6m |
|
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